Web15 Jun 2024 · SPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD and MVD ® wafer processing solutions for the MEMS, advanced … WebIn 2013, SPTS and imec, a world-leading nanoelectronics research center announced a joint partnership to further advance micro- and nanosized components for BioMEMS, using …
NanoFab Tool: SPTS Omega c2L Rapier Deep Silicon …
Web10 Nov 2024 · The SF6 based plasma etch undercuts the first mask arrangement with an undercut that is at least 10% of the depth of a corresponding etch feature. Type: Grant. … Web13 Sep 2024 · The STS Pegasus 4 is intended for etching single crystal silicon. While it is capable of etching silicon dioxide, silicon nitride, and poly-silicon, there are other tools at … fleet complete gps manual
Etching tools and deposition tools Corial
Web2 Jun 2014 · Having achieved excellent throughput and high quality yields with our 200mm silicon etch tools, the customer chose our Omega fxP as their etch platform of choice in … WebSPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible. … SPTS Technologies, a KLA company, designs, manufactures, sells, and … Contact - SPTS Technologies - etch, deposition and thermal equipment for ... Presentations - SPTS Technologies - etch, deposition and thermal equipment for ... SPTS's ICP, DRIE, PECVD, PVD and MOCVD modules are available on 3 wafer … Plasma Etch - SPTS Technologies - etch, deposition and thermal equipment for ... Careers Profiles - SPTS Technologies - etch, deposition and thermal equipment for ... Case Studies - SPTS Technologies - etch, deposition and thermal equipment for ... SPTS offers a range of technologies which can be employed to manufacture both … Web22 Jun 2014 · The SPTS Omega c2L Rapier deep silicon etcher is an inductively coupled plasma (ICP) etching system used for etching deep features in silicon. The tool uses a fast switching Bosch process that … fleet complete gps tracking